JPS4915899A - - Google Patents

Info

Publication number
JPS4915899A
JPS4915899A JP5651272A JP5651272A JPS4915899A JP S4915899 A JPS4915899 A JP S4915899A JP 5651272 A JP5651272 A JP 5651272A JP 5651272 A JP5651272 A JP 5651272A JP S4915899 A JPS4915899 A JP S4915899A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5651272A
Other languages
Japanese (ja)
Other versions
JPS5236240B2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5651272A priority Critical patent/JPS5236240B2/ja
Publication of JPS4915899A publication Critical patent/JPS4915899A/ja
Publication of JPS5236240B2 publication Critical patent/JPS5236240B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP5651272A 1972-06-08 1972-06-08 Expired JPS5236240B2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 (en]) 1972-06-08 1972-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651272A JPS5236240B2 (en]) 1972-06-08 1972-06-08

Publications (2)

Publication Number Publication Date
JPS4915899A true JPS4915899A (en]) 1974-02-12
JPS5236240B2 JPS5236240B2 (en]) 1977-09-14

Family

ID=13029164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651272A Expired JPS5236240B2 (en]) 1972-06-08 1972-06-08

Country Status (1)

Country Link
JP (1) JPS5236240B2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0344855U (en]) * 1989-09-08 1991-04-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61124125A (ja) * 1984-11-20 1986-06-11 Tokuda Seisakusho Ltd プラズマ処理装置
JPH0344855U (en]) * 1989-09-08 1991-04-25

Also Published As

Publication number Publication date
JPS5236240B2 (en]) 1977-09-14

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